Pulsed Capillary Discharge

Researcher:   C.S. Wong

In collaboration with:   P. Choi, EPPRA sas, Coutaboeuf, France
and: Zanuldin Ahmad, Malaysian University of Science & Tachnology (MUST)

---

The 40 kV, 22 nF pulsed capillary discharge.

Publications:

PLASMA RADIATION SOURCES

C.S. Wong, J. Fiz. Mal. 23, 4 (2002).

ELECTRICAL CHARACTERISTICS OF A PULSED CAPILLARY DISCHARGE

C.S. Wong, P. Choi, J. Lorour and S. Mazoyer, J. Fiz. Mal. 23, 36 (2002).

PULSED PLASMA X-RAY AND EUV SOURCES – Invited

C.S. Wong, Mal. J. Sci. 21A, 65 (2002)

OPERATION OF A PULSED CAPILLARY DISCHARGE FOR IN-BAND EUV EMISSION

TO BE EMPLOYED IN NEXT GENERATION LITHOGRAPHY

L.M. Yap, Zanuldin Ahmad and C.S. Wong, J. Fiz. Mal. 26, 45 (2005)

---