Plasma Technology Research Center

Physics Department, University of Malaya
50603 Kuala Lumpur, Malaysia
Tel: (603)79674395
Fax: (603)79674146

 


Vacuum Spark Device

 

In the vacuum spark concept, a capacitor is discharged through two properly shaped electrodes, made of selected materials, in a vacuum. This high current discharge produces intense pulsed hard X-rays. The interest of the researcher here is applying the device as X-ray/EUV sources for Next Generation Lithography .

Vacuum spark device

Researchers:

Professor Dr. Wong Chiow San, Dr. Yap Seong Ling, Mr Jasbir Singh

 

Postgraduates:

Solmaz Saboohi, Ngoi Siew Kien

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