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Plasma Technology Research Center Physics Department, University of Malaya |
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Vacuum Spark Device
In the vacuum spark concept, a capacitor is discharged through two properly shaped electrodes, made of selected materials, in a vacuum. This high current discharge produces intense pulsed hard X-rays. The interest of the researcher here is applying the device as X-ray/EUV sources for Next Generation Lithography . |
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Vacuum spark device |
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Researchers: Professor Dr. Wong Chiow San, Dr. Yap Seong Ling, Mr Jasbir Singh
Postgraduates: Solmaz Saboohi, Ngoi Siew Kien |
