Plasma Technology Research Center

Physics Department, University of Malaya
50603 Kuala Lumpur, Malaysia
Tel: (603)79674395
Fax: (603)79674146

 


RF Inductively Coupled Plasma Device

 

There are two types of inductively couple plasma devices which is the planar and cylindrical geometry. In planar geometry, the electrode is a coil of flat metal wound like a spiral. In cylindrical geometry, it is like a helical spring.

When a time-varying electric current is passed through the coil, it creates a time varying magnetic field around it, which in turn induces electric currents in the working gas, leading to break down and formation of plasma.

The interests of the group in the center are to employ the device for material processing and biomedical material treatment.

RF Inductively Coupled Plasma Device

Researchers:

Professor Dr. Wong Chiow San, Associate Professor Dr. Chin Oi Hoong, Dr. Ng Kim Hui, Dr. Yap Seong Ling, Mr Jasbir Singh

 

Postgraduates:

Kanesh Kumar

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