Pulsed Capillary Discharge Device

 

A pulsed capillary discharge system is basically a Z-pinch discharge restricted to occur within a small diameter capillary channel. The plasma in the capillary discharge is known to produce X-ray and EUV emission. The research group in the center is working on the device as X-ray/EUV sources for Next Generation Lithography.

 

 

 

 

 

Researchers:

Professor Dr. Wong Chiow San, Dr. Yap Seong Ling, Mr Jasbir Singh

 

Postgraduates:

Chan Li San, Daryl Tan