Pulsed Capillary Discharge Device
A pulsed capillary discharge system is basically a Z-pinch discharge restricted to occur within a small diameter capillary channel. The plasma in the capillary discharge is known to produce X-ray and EUV emission. The research group in the center is working on the device as X-ray/EUV sources for Next Generation Lithography.
Professor Dr. Wong Chiow San, Dr. Yap Seong Ling, Mr Jasbir Singh
Chan Li San, Daryl Tan